A silicon subminiature microphone based on piezoresistive polysilicon strain gauges-Reference-Cited by-同舟云学术

A silicon subminiature microphone based on piezoresistive polysilicon strain gauges

Published:1992-04 Issue:1-3 Volume:32 Page:555-559
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schellin R.,Hess G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. A subminiature condenser microphone with silicon-nitride membrane and silicon backplate;Hohm;J. Acoust. Soc. Am.,1989

2. Piezoelektrische Sensoren auf Siliziumbasis für akustische Anwendungen;Franz,1988

3. A silicon subminiature electret microphone;Sprenkels;Proefschrift,1988

4. Silicon condenser microphone with integrated field-effect transistor;Kuehnel;Sensors and Actuators A,1991

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