SiO2 electrets for electric-field generation in sensors and actuators-Reference-Cited by-同舟云学术

SiO2 electrets for electric-field generation in sensors and actuators

Published:1992-04 Issue:1-3 Volume:32 Page:357-360
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Günther P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. A subminiature condenser microphone with silicon nitride membrane and silicon back plate;Holm;J. Acoust. Soc. Am.,1989

2. Microdynamics;Muller;Sensors and Actuators,1990

3. The fabrication of an electrostatic linear actuator by silicon micromachining;Hiroyuki;IEEE Trans. Electron Devices, ED-35,1988

4. An electrostatic top motor and its characteristics;Sakata;Sensors and Actuators,1990

5. Silicon-dioxide electret transducer;Hohm;J. Acoust. Soc. Am.,1984

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