Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference32 articles.
1. The resonant gate transistor;Nathanson;IEEE Trans. Electron Devices,1967
2. A gas chromatograph system fabricated on a silicon wafer using integrated circuit technology;Terry,1975
3. Silicon as a mechanical material;Petersen;Proc. IEEE,1982
4. Resonant-microbridge vapor sensor;Howe;IEEE Trans. Electron Devices,1986
5. Selective chemical vapor deposition of tungsten for microelectromechanical structures;MacDonald;Sensors and Actuators,1989
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