1. Integrated optics combined with micromechanics on silicon;Bezzaoui;Sensors and Actuators A,1991
2. Micro-mechanical structures as integrated optical sensor elements;Wu;Tech. Digest, Integrated Photonic Research Topical Meeting, New Orleans, LA, USA,1992
3. Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide;Burcham;SPIE Symp. OE/Fibers '92, Boston, MA, USA,1992
4. Micromechanical devices on silicon with integrated optical read-out;Bazzaoui,1992
5. Integrated optical pressure sensor with coupling structures;Müller,1992