Author:
Fan L.S.,Howe R.T.,Muller R.S.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
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5. Novel microstructures for the in situ measurement of mechanical properties of thin films;Mehregany;J. Appl. Phys.,1987
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