Final capping passivation layers for long-life microsensors in real fluids-Reference-Cited by-同舟云学术

Final capping passivation layers for long-life microsensors in real fluids

Published:2013-03 Issue: Volume:178 Page:350-358
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Vanhove E.,Tsopéla A.,Bouscayrol L.,Desmoulin A.,Launay J.,Temple-Boyer P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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