An oscillator circuit for electrostatically driven silicon-based one-port resonators-Reference-Cited by-同舟云学术

An oscillator circuit for electrostatically driven silicon-based one-port resonators

Published:1996-03 Issue:1-3 Volume:52 Page:179-186
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bienstman Jan,Tilmans Harrie A.C.,Peeters Erik J.E.A.,Steyaert Michiel,Puers Robert

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

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2. Development of quartz crystal oscillators for under-liquid sensing;Barnes;Sensors and Actuators A,1991

3. Micro resonant force gauges;Tilmans;Sensors and Actuators A,1992

4. Electrostatically driven vacuumencapsulated polysilicon resonators. Part II: theory and performance;Tilmans;Sensors and Actuators A,1994

5. MOS crystal oscillator design;Meyer;IEEE J. Solid-State Circuits, SC-15,1980

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