Dynamics of polysilicon parallel-plate electrostatic actuators-Reference-Cited by-同舟云学术

Dynamics of polysilicon parallel-plate electrostatic actuators

Published:1996-03 Issue:1-3 Volume:52 Page:216-220
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chu Patrick B.,Nelson Phyllis R.,Tachiki Mark L.,Pister Kristofer S.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. Microfabricated hinges;Pister;Sensors and Actuatorr A,1992

2. Squeeze-film damping in solid-state accelerometers;Starr,1990

3. Analysis of closed-loop control of parallelplate electrostatic microgrippers;Chu,1994

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