Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer-Reference-Cited by-同舟云学术

Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer

Published:1991-05 Issue:1-3 Volume:27 Page:723-727
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Legtenberg Rob,Bouwstra Siebe,Fluitman Jan H.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Thermally excited resonating membrane mass flow sensor;Bouwstra;Sensors and Actuators,1989

2. Resonating microbridge mass flow sensor;Bouwstra;Sensors and Actuators,1990

3. LPCVD silicon-rich silicon nitride thin films for micromechanical applications;Bouwstra;Tech. Digest, Eurosensors II, Enschede, The Netherlands,1988

4. In situ phosphorus-doped polysilicon for excitation and detection of micromechanical resonators;Bouwstra;Sensors and Actuators,1990

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Front-side releasing <110> oriented clamped–clamped beams for piezoresistive sensors;Journal of Micromechanics and Microengineering;2023-06-02

2. Improved PECVD SixNyfilm as a mask layer for deep wet etching of the silicon;Materials Research Express;2017-09-06

3. Single crystalline 4H-polytype silicon carbide microresonator sensor for mass detection;Materials Letters;2014-08

4. A dynamic thermal flow sensor for simultaneous measurement of thermal conductivity and flow velocity of gases;Sensors and Actuators A: Physical;2014-02

5. Simulation and fabrication of SiO2-based piezoresistive microbridges for chem/biosensors;Journal of Micromechanics and Microengineering;2006-03-06