Author:
Bouwstra Siebe,Kemna Paul,Legtenberg Rob
Reference21 articles.
1. Sensor needs in semiconductor plants;J.S.T. News,1984
2. Monolithic flow sensors a survey;Huijsing,1980
3. A highly sensitive chip microtransducer for air flow and differential pressure sens- ing applications;Johnson;Sensors and Actuators,1987
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