Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding-Reference-Cited by-同舟云学术

Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding

Published:1996-05 Issue:1-3 Volume:53 Page:361-363
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Köhler U,Guber A.E,Bier W,Heckele M

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. Plasmaless dry etching with fluorine-containing compounds;Ibbotson;J. Appl. Phys.,1984

2. Plasmaloses and laserinduziertes Ätzen von Silicium mit den Halogenen Fluor, Chlor and Brom;Köhler,1995

3. Miniaturisierte fluidische Strahlelemente in LIGA-Technik mit integrierter elektrischer Steuerung;Vollmer,1994

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