Fabrication of concave spherical microlenses on silicon by femtosecond laser irradiation and mixed acid etching-Reference-Cited by-同舟云学术

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Fabrication of concave spherical microlenses on silicon by femtosecond laser irradiation and mixed acid etching

Published:2014-06-13 Issue:12 Volume:22 Page:15245
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Pan An,Gao Bo,Chen Tao,Si Jinhai,Li Cunxia,Chen Feng,Hou Xun

Funder

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference30 articles.

1. Bidirectional optical subassembly with prealigned silicon microlens and laser diode

2. Compact infrared cryogenic wafer-level camera: design and experimental validation

3. Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding

4. Optical fabrication of microlenses in chalcogenide glasses

5. Variable-focus liquid lens

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