Experimental and numerical study of the CO2 laser-polishing edge effect on silica surface
Author:
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00170-023-12015-7.pdf
Reference42 articles.
1. Chkhalo NI et al (2016) Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics. Appl Opt 55(6):1249–1256
2. Gerhard C et al (2013) Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure. J Eur Opt Soc Rapid Publ 8:2013
3. Kim W-B et al (2015) Material removal of glass by magnetorheological fluid jet. Int J Precis Eng Manuf 16(4):629–637
4. Kanaoka M et al (2007) Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics. J Vac Sci Technol B 25(6):2110–2113
5. Laguarta F, Lupon N, Armengol J (1994) Optical glass polishing by controlled laser surface-heat treatment. Appl Opt 33(27):6508–6513
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