Author:
Huang J.-B.,Tong Q.-Y.,Mao P.-S.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. IC-processed electrostatic micro-motors;Fan;1988 IEEE Int. Electron Devices Meeting, San Francisco, CA, USA,11141988
2. IC-processed electrostatic synchronous micromotor;Tai;Sensors and Actuators,1989
3. Integrated movable micro-mechanical structures for sensors and actuators;Fan;IEEE, Trans. Electron Devices,1988
4. A LOCOS process for an electrostatic microfabricated motor;Tavrow;Sensors and Actuators,1990
5. A study of three microfabricated variable-capacitance motors;Mehregany;Sensors and Actuators,1990
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