1. Design considerations for micromachined electric actuators;Bart;Sensors and Actuators,1988
2. An analysis of electroquasistatic induction micromotors;Bart;Sensors and Actuators,1989
3. IC-processed electrostatic micro-motors;Fan;Proc. 1988 IEEE Int. Electron Devices Meet., IEEE Electron Devices Soc., San Francisco, CA, U.S.A.,11141988
4. IC-processed micro-motors: design, technology, and testing;Tai;Proc. Micro Electro Mechanical Systems, IEEE Robotics and Automation Council, Salt Lake City, UT, U.S.A.,20221989
5. In situ measurement of friction and wear in integrated polysilicon micromechanisms;Gabriel;Sensors and Actuators,1990