1. Muller, R.S. (ed.): Microelectromechanical Systems: Advanced Materials and Fabrication Methods. NMAB-483, National Academy Press (1997)
2. Ananthasuresh, G.K. (ed.): Optimal Synthesis Methods for MEMS. Kluwer Academic Publishers (2003)
3. Tang, W.C., Nguyen, T.-C., Howe, R.T.: Laterally driven polysilicon resonant microstructures. Sens. Actuators 20(1–2), 25–32 (1989)
4. Aksyuk, V.A., Pardo, F., Bolle, C.A., Arney, S., Giles, C.R., Bishop, D.J.: Lucent Microstar micromirror array technology for large optical crossconnects. In: Proceedings of the SPIE, MOEMS and Miniaturized Systems, vol. 4178 (2000). https://doi.org/10.1117/12.396503
5. Krishnan, G., Ananthasuresh, G.K.: Evaluation and design of compliant displacement amplifying mechanisms for sensor applications. J. Mech. Des. 130(10), 102304, 1–9 (2008)