Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. A subminiature capacitive movement detector using a composite membrane suspension;Puers;Sensors and Actuators A,1992
2. A composite membrane movement detector with dedicated interface electronics for animal activity tracking;Vergote;Sensors and Actuators A,1993
3. Integrated capacitive accelerometer with novel electrostatic force balancing;Matsumoto;Tech. Digest, 11th Sensor Symp.,1992
4. Problems encountered in the development of a microscale g-switch using three design approaches;Robinson;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87) Tokyo, Japan,251987
5. Silicon as a mechanical material;Petersen;Proc. IEEE,1982
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