Author:
Vergote S.,De Cooman M.,Wouters P.,Puers B.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. A subminiature capacitive movement detector using a composite membrane suspension;Puers;Proc. Eurosensors V, Rome, Italy,1991
2. A low power multi-channel sensor interface for use in digital telemetry;Puers;Sensors and Actuators A,1993
3. A capacitive pressure sensor with low impedance output and active suppression of parasitic effects;Puers;Sensors and Actuators,1990
4. A highly symmetrical capacitive micro-accelerometer with single degree-of-freedom response;Peeters;Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, USA,1991
5. Compensation structures for convex corner micromachining in silicon;Puers;Sensors and Actuators,1990
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