Author:
Givargizov Eugene I.,Limanov Alexander B.,Prjakhin Gennadi D.,Vaganov Vladimir I.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Classification of IC pressure sensor structures;Vaganov;Izmer. Tech. (Meas. Tech.),1980
2. Construction problems in sensors;Vaganov;Sensors and Actuators A,1991
3. Laser-recrystallized polysilicon resistors for sensing and integrated circuits applications;Binder;Sensors and Actuators,1983
4. Piezoresistive properties of polycrystalline and crystalline silicon films;Schubert;Sensors and Actuators,1987
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3 articles.
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