1. Piezoresistive properties of polycrystalline silicon;Seto;J. Appl. Phys.,1976
2. Piezoresistance effects in a-Si:H:F films and application to strain gauges;Kodato;Proc. 2nd Sensor Symp., Tsukuba, Japan,1982
3. Polykristalline Siliziumschichten als Basismaterial für Sensoren;Obermeier;NTG-FB 79, Fachtagung Bad-Nauheim,1982
4. Polycrystalline silicon-on-metal strain gauge transducers;Erskine;IEEE Trans. Electron Devices, ED-30,1983
5. Low-cost pressure/force transducer with silicon thin film strain gauges;Germer;Sensors and Actuators,1983