Low-cost pressure/force transducer with silicon thin film strain gauges-Reference-Cited by-同舟云学术

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Low-cost pressure/force transducer with silicon thin film strain gauges

Published:1983-01 Issue: Volume:4 Page:183-189
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Germer W.,Tödt W.

Publisher

Elsevier BV

Subject

General Engineering

Reference3 articles.

1. Niederdruck-Messaufnehmer mit Halbleiter-Dünnfilm-Dehnungmessstreifen;Bethe,1982

2. The electrical properties of polycrystalline silicon films;Seto;J. Appl. Phys.,1975

3. W. Germer and W. Tödt, Planare Druck-/Kraft-Sensoren mit kondensierten Halbleiter-Dünnfilm-Dehnungmessstreifen, Proc. SENSOR '83,Basel, Switzerland, May 17 – 19, 1983, to be published.

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1. Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications;Materials Horizons;2021

2. Large gauge factor of hot wire chemical vapour depositionin-situboron doped polycrystalline silicon;Materials Research Express;2016-04-20

3. (Invited) Thin Film Technologies for Micro/Nano Systems; A Review;ECS Transactions;2014-03-26

4. Investigation of Nanometric Thin-Film Bismuth Piezoresistors Deposited on Silicon Substrates;MRS Proceedings;2012

5. Analysis for piezoresistive property of heavily-doped polysilicon with upper and lower bounds;Journal of Applied Physics;2010-09-15

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