Author:
Ju Chishein,Hesketh Peter J.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
15 articles.
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1. Anisotropic etching of Si;Journal of Micromechanics and Microengineering;2019-07-30
2. Anisotropic etching of silicon in solutions containing tensioactive compounds;SPIE Proceedings;2016-12-22
3. Wet Etching of Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015
4. GaAs micromachining in the 1 H2SO4:1 H2O2:8 H2O system. From anisotropy to simulation;The European Physical Journal Applied Physics;2011-01-28
5. Wet Etching of Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2010