Anisotropic etching of Si
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/ab2b8d/pdf
Reference55 articles.
1. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
2. Aqueous KOH Etching of Silicon (110): Etch Characteristics and Compensation Methods for Convex Corners
3. Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration
4. Differences in anisotropic etching properties of KOH and TMAH solutions
5. Characterization of the anisotropic chemical attack of (hhl) silicon plates in a TMAH 25 wt.% solution: micromachining and adequacy of the dissolution slowness surface
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