Author:
Scheeper P.R.,Voorthuyzen J.A.,Olthuis W.,Bergveld P.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Semiconductor-based electret sensors for sound and pressure;Voorthuyzen;IEEE Trans. Elect. Insul.,1989
2. Fabrication of micromechanical devices from polysilicon films with smooth surfaces;Guckel;Sensors and Actuators,1989
3. Operation of microfabricated harmonic and ordinary side-drive motor;Mehregany;Proc. IEEE MEMS, Napa Valley, California, USA,1990
4. Investigations on free-standing polysilicon beams in view of their application as transducers;Linder;Sensors and Actuators,1990
5. Surface-micromachining processes for electrostatic microactuator fabrication;Lober;Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, USA,1988
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