Investigating the effect of varying coating thickness on the surface roughness and adhesion forces of MEMS surfaces utilizing a theoretical and experimental approach-Reference-Cited by-同舟云学术

Investigating the effect of varying coating thickness on the surface roughness and adhesion forces of MEMS surfaces utilizing a theoretical and experimental approach

Published:2019-07 Issue: Volume:481 Page:531-539
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Kolahdoozan Mojtaba,Kiani Ali,Heidari Pedram,Oveissi Soheil

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference25 articles.

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