Piezoresistive accelerometer with overload protection and low cross-sensitivity-Reference-Cited by-同舟云学术

Piezoresistive accelerometer with overload protection and low cross-sensitivity

Published:1993-12 Issue:3 Volume:39 Page:201-207
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Crazzolara H.,Flach G.,von Miinch W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. Precision accelerometers with μg resolution;Rudolf;Sensors and Actuators,1990

5. Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan;Sandmaier;A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation,1987

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