Evaluation of the fabrication of pressure sensors using bulk micromachining before IC processing-Reference-Cited by-同舟云学术

Evaluation of the fabrication of pressure sensors using bulk micromachining before IC processing

Published:1995-01 Issue:1-3 Volume:46 Page:147-150
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

de Samber M.A.,Ho-Tran T.P.L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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5. K.H.-L. Chan, C.D. Fung, P. Rowe Harris and G.A. Dahrooge, A versatile polysilicon diaphragm pressure sensor, Proc. IEDM, 1991, pp. 761-764

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3. Design and manufacturing of a pressure sensor with capacitive readout, CMOS compatible;2001 International Semiconductor Conference. CAS 2001 Proceedings (Cat. No.01TH8547)

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