Capabilities and limits of silicon pressure sensors
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference49 articles.
1. Sensors for biomedical applications;Bergveld;Sensors and Actuators,1986
2. Static response of miniature capacitive pressure sensors with square or rectangular diaphragm.;Blasquez;Rev. Phys. Appl.,1987
3. Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors;Clark;IEEE. Trans. Electron Devices, Ed-26,1979
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