Temperature-independent pressure sensors using polycrystalline silicon strain gauges-Reference-Cited by-同舟云学术

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Temperature-independent pressure sensors using polycrystalline silicon strain gauges

Published:1989-05 Issue:3-4 Volume:17 Page:521-527
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Schäfer H.,Graeger V.,Kobs R.

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Sensoren mit Dünnfilm-Dehnungsmessstreifen aus metallischen halbleitenden Materialien;Bethe;NTG-Fachberichte, Sensoren-Technologie und Anwendung,1982

2. Polycrystalline silicon-based sensors;Lüder;Sensors and Actuators,1986

3. The effect of film thickness on the electrical properties of LPCVD polysilicon films;Lu;J. Electrochem. Soc.,1984

4. The electrical properties of polycrystalline silicon films;Seto;J. Appl. Phys.,1975

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