An electrostatic top motor and its characteristics-Reference-Cited by-同舟云学术

An electrostatic top motor and its characteristics

Published:1990-02 Issue:1-3 Volume:21 Page:168-172
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sakata Minoru,Hatazawa Yasuyoshi,Omodaka Akito,Kudoh Tomohiro,Fujita Hiroyuki

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Studies of micro actuators in Japan;Fujita;Proc. 1989 IEEE Conf. Robotics and Automation, Scottsdale, AZ, U.S.A.,1989

2. Fabrication of an electrostatic linear actuator by silicon micromachining;Fujita;IEEE Trans. Electron Devices,1988

3. IC processed electrostatic micro-motors;Fan;Sensors and Actuators,1989

4. Electrostatic micromotors: electromechanical characteristics;Lang;IEEE Micro and Teleoperators Workshop, Hyannis, MA, U.S.A.,1987

5. Design considerations for a practical electrostatic micro-motor.;Trimmer;Sensors and Actuators,1987

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