Author:
Seredin P.V.,Kashkarov V.M.,Arsentyev I.N.,Bondarev A.D.,Tarasov I.S.
Funder
Russian Ministry of Education
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference35 articles.
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5. Texture of the nano-crystalline AlN thin films and the growth conditions in DC magnetron sputtering;Khan;Prog. Nat. Sci. Mater. Int.,2015
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