Author:
Jiang Huihua,Yang Deren,Ma Xiangyang,Tian Daxi,Li Liben,Que Duanlin
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
6 articles.
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1. Oxygen precipitation in 1020 cm−3 germanium-doped Czochralski silicon;Journal of Applied Physics;2015-01-14
2. Epi Wafers;Handbook of Silicon Based MEMS Materials and Technologies;2015
3. Epi Wafers;Handbook of Silicon Based MEMS Materials and Technologies;2010
4. Impurity Engineering of Czochralski Silicon;Solid State Phenomena;2009-10
5. Low Stress Silicon Layer Transfer onto Quartz Through Hydrogen Capture within Si (B/Ge) Buried Layer;Electrochemical and Solid-State Letters;2009