Author:
Rizzi Enea,Mauri Luca,Moraja Marco,Conte Andrea,Bonucci Antonio,Longoni Giorgio,Amiotti Marco
Reference39 articles.
1. Shimizu, S., Matsuyama, M., Piezoelectric vibrator and manufacturing method thereof, U.S. patent 6 924 582, issued date August 08, 2005.
2. Fundamentals of Microfabrication;Madou,2002
3. M. Moraja, M. Amiotti, Getters films at wafer level for wafer to wafer bonded MEMS, in: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP’03), 2003, pp. 346–349.
4. Vacuum wafer level packaging for MEMS applications;Caplet;Proc. SPIE,2003
5. Resonant silicon sensors;Stemme;J. Micromech. Microeng.,1991
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