Laser scanning patterns induced surface properties variations of Ti-V-Hf-Zr non-evaporable getter film with 316L stainless steel substrates

Author:

Si Qingyu,Wang JieORCID,Wu Tao,Yigit Kaan,Sun Qiuyu,Zhang Yinqiao,Li Zhifeng,Wu Huaying,Zhang Runxia,Liu JunliangORCID,Wang Sheng

Funder

Basic and Applied Basic Research Foundation of Guangdong Province

Fundamental Research Funds for the Central Universities

National Natural Science Foundation of China

Publisher

Elsevier BV

Reference72 articles.

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3. Vacuum chamber conditioning and saturation simulation tool (VacuumCOST): Enabling time-dependent simulations of pressure and NEG sticking in UHV chambers;Henriksen;Vacuum,2023

4. Distributed Pumping by Non-Evaporable Getters in Particle Accelerators;Ferrario;IEEE Transactions on Nuclear Science,1981

5. E.-M. Bourim, H.Y. Kim, N.-K. Chung, Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications, 9(10) (2018) 490.

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