Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. H.H. Gatzen, H.-D. Stölting, S. Büttgenbach, H. Dimigen, A novel variable reluctance micromotor for linear actuation, Proceedings of Actuator 2000, Bremen, 2000, pp. 363–366.
2. Coercivity analysis in sputtered Sm–Co thin films
3. Ion beam deposition of permanent magnet layers for liftoff processes
4. Etching in Microsystem Technology;Köhler,1999
5. Y. Konaka, G.A. Allen, Single- and multi-layer electroplated microaccelerometers, Proceedings of the Ninth Annual International Workshop on Micro Electro Mechanical Systems 1995, San Diego, CA, USA, February 11–15, 1996, pp. 168–173.
Cited by
29 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献