Effect of patterning on SmCo micromagnets suitable for integration in microsystems

Author:

Koplak OksanaORCID,Maspero FedericoORCID,Marson Francesca,Cocconcelli MariaORCID,Plaza Alejandro,Bertacco RiccardoORCID

Publisher

Elsevier BV

Reference47 articles.

1. Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems;Walther;J. Magn. Magn. Mater.,2009

2. N.M. Dempsey, Hard magnetic materials for MEMS applications, in: J.P. Liu, E. Fullerton, O. Gutfleisch, D.J. Sellmyer (Eds.), Nanoscale Magn. Mater. Appl., Springer US, Boston, MA, 2009: pp. 661–683. https://doi.org/10.1007/978-0-387-85600-1_22.

3. Integration of thick-film permanent magnets for MEMS applications;Jackson;J. Microelectromechanical Syst.,2016

4. Patterned sputter deposited SmCo-films for MEMS applications;Budde;J. Magn. Magn. Mater.,2002

5. C. Wacker, FRAUNHOFER Achievements and Results - Annual Report, Production. (2017). chrome-extension://efaidnbmnnnibpcajpcglclefindmkaj/https://www.isit.fraunhofer.de/content/dam/isit/de/documents-18/jahresbericht-2017.pdf.

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