Numerical simulation for silicon crystal growth of up to 400 mm diameter in Czochralski furnaces-Reference-Cited by-同舟云学术

Numerical simulation for silicon crystal growth of up to 400 mm diameter in Czochralski furnaces

Published:2000-04 Issue:1-3 Volume:73 Page:30-35
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Takano K,Shiraishi Y,Iida T,Takase N,Matsubara J,Machida N,Kuramoto M,Yamagishi H

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference10 articles.

1. H. Yamagishi, M. Kuramoto, Y. Shiraishi, N. Machida, K. Takano, N. Takase, T. Iida, J. Matsubara, H. Minami, M. Imai, K.Takada, Abstract of Spring Meeting 1998, European Materials Research Society, p. F-3.

2. Global modelling of heat transfer in crystal growth furnaces

3. Growth of Silicon Crystals Free from Dislocations

4. Improvements on the Pedestal Method of Growing Silicon and Germanium Crystals

5. T. Abe, ULSI Science and Technology 1997, Proceedings Vol. 97-3, The Electrochemical Society, Pennington, NY, 1997, pp. 123.

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm Czochralski silicon crystal growth;Rare Metals;2017-01-07

2. Optimization of heat shield for single silicon crystal growth by using numerical simulation;Rare Metals;2012-10

3. Numerical modeling of crystal growth and solidification experiments carried out under microgravity conditions;Crystal Research and Technology;2003-07

4. Heat transfer – a review of 2000 literature;International Journal of Heat and Mass Transfer;2002-07

5. Crystals and polycrystals: FEM and BEM material modelling;Finite Elements in Analysis and Design;2002-03