Dry etching mechanism of copper and magnetic materials with UV illumination
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference32 articles.
1. Laser-induced desorption and etching processes on chlorinated Cu and solid CuCl surfaces
2. The interaction of chlorine with copper
3. Ultraviolet photoetching of copper
4. Excimer laser ablation and etching
5. Low Temperature Copper Etching Using an Inductively Coupled Plasma with Ultraviolet Light Irradiation
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2. Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models;Applied Physics Reviews;2019-03
3. Chemical Etching and Patterning of Copper, Silver, and Gold Films at Low Temperatures;ECS Journal of Solid State Science and Technology;2014-10-29
4. Low Temperature Cu Etching Using CH4-Based Plasmas;ECS Journal of Solid State Science and Technology;2013
5. High electronegativity multi-dipolar electron cyclotron resonance plasma source for etching by negative ions;Journal of Applied Physics;2012-04-15
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