Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference18 articles.
1. T.A. Gessert, X. Li, T.J. Coutts, P.W. Pholps, N. Tzafaras, Proc. of 3rd Intl. Conf. on InP and Related Materials, Wales, UK, 1991, p. 32.
2. Optically transparent indium-tin-oxide (ITO) ohmic contacts in the fabrication of vertical-cavity surface-emitting lasers
3. Bilayer SnO2:In/SnO2 thin films as transparent electrodes of amorphous silicon solar cells
4. Reaction kinetics of the formation of indium tin oxide films grown by spray pyrolysis
5. Electrical properties and defect model of tin-doped indium oxide layers
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