Structural study of plasma enhanced chemical vapour deposited silicon carbide films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference11 articles.
1. Recent Progress of Amorphous Silicon Solar Cell Technology
2. Light-induced metastable defects in hydrogenated amorphous silicon
3. Structural properties of amorphous silicon carbide films by plasma‐enhanced chemical vapor deposition
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