Effects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference23 articles.
1. Optical and electrical properties of aluminum oxide films deposited by spray pyrolysis
2. The effect of residual stress on the adhesion of PECVD-coated aluminum oxide film on glass
3. Control of the structure and properties of aluminum oxide coatings deposited by pulsed magnetron sputtering
4. Alumina films by sputter deposition with Ar/O2: Preparation and characterization
5. Reactive direct current magnetron sputtering of aluminum oxide coatings
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