TiN deposition and morphology control by scalable plasma-assisted surface treatments

Author:

Baranov Oleg,Fang Jinghua,Ostrikov Kostya (Ken),Cvelbar Uroš

Funder

Australian Research Council

CSIRO’s OCE Science Leadership Scheme

Slovenian Research Agency

Publisher

Elsevier BV

Subject

Condensed Matter Physics,General Materials Science

Reference70 articles.

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5. Role of ex-situ oxygen plasma treatments on the mechanical and optical properties of diamond-like carbon thin films

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