Evaluation of adhesion and tribological behaviour of tantalum oxynitride thin films deposited by reactive magnetron sputtering onto steel substrates-Reference-Cited by-同舟云学术

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Evaluation of adhesion and tribological behaviour of tantalum oxynitride thin films deposited by reactive magnetron sputtering onto steel substrates

Published:2006-06 Issue:22-23 Volume:200 Page:6500-6504
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Banakh O.,Csefalvay C.,Steinmann P.-A.,Fenker M.,Kappl H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference16 articles.

1. Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering

2. Impact of post-deposition-annealing on the electrical characteristics of HfOxNy gate dielectric on Ge substrate

3. Graded selective coatings based on chromium and titanium oxynitride

4. Interdiffusions in Cu/reactive‐ion‐sputtered TiN, Cu/chemical‐vapor‐deposited TiN, Cu/TaN, and TaN/Cu/TaN thin‐film structures: Low temperature diffusion analyses

5. Mechanical and tribological characterization of DC magnetron sputtered tantalum nitride thin films

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1. Tantalum Oxynitride Thin Films: Assessment of the Photocatalytic Efficiency and Antimicrobial Capacity;Nanomaterials;2019-03-23

2. Examination of various characteristics for sputtered tantalum oxide-nitride thin films deposited at various oxygen flowrates;Integrated Ferroelectrics;2017-11-22

3. Structural characteristics of samarium oxynitride on silicon substrate;Journal of Alloys and Compounds;2017-10

4. Samarium Oxide and Samarium Oxynitride Thin Film as Alternative Gate Oxide on Silicon Substrate;Reference Module in Materials Science and Materials Engineering;2017

5. Reactive-sputter-deposited β-Ta 2 O 5 and TaON nanoceramic coatings on Ti–6Al–4V alloy against wear and corrosion damage;Surface and Coatings Technology;2016-06

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