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Photolithographic structuring of a thin metal film coil on a Zerodur cylinder

  • Published:2005-10 Issue:1-4 Volume:200 Page:1061-1064
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Siewert C.,Löffler F.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference8 articles.

1. S. Nietzsche, Freifallexperimente mit SQUID-basierten Positionsdetektoren, Jena, Univ., Diss., 2001 S.17.

2. V. Seidemann, Induktive Mikrosysteme: Technologieentwicklung und Anwendung, Braunschweig, Univ. Diss., 2003.

3. Halbleitertechnologie: eine einführung in die prozesstechnik von silizium und III-V-verbindungen;Beneking,1991

4. Materialbearbeitung mit Lasern;Bimberg,1991

5. Functional metal-based coatings on ceramic substrates

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