High-temperature oxidation resistance of Ta–Si–N films with a high Si content
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference16 articles.
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4. Oxidation of TiN, ZrN, TiZrN, CrN, TiCrN and TiN/CrN multilayer hard coatings reactively sputtered at low temperature
5. High temperature oxidation of TiCrN coatings deposited on a steel substrate by ion plating
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2. The effect of the Ar/N2 gas ratio on the structure and properties of Ta-Si-N coatings produced by magnetron sputtering of TaSi2 target;Surfaces and Interfaces;2023-04
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4. Structure and Properties of Ta–Si–N Coatings Produced by Pulsed Magnetron Sputtering;Russian Journal of Non-Ferrous Metals;2021-09
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