Investigation of Ta-Si-N coatings obtained by pulsed magnetron sputtering of multicomponent Ta5Si3-TaN-Si3N SHS target
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1742-6596/2036/1/012017/pdf
Reference17 articles.
1. Strain sensitivity of TiB2, TiSi2, TaSi2 and WSi2 thin films as possible candidates for high temperature strain gauges
2. Microstructure and thermal stability of TaSi2 coating fabricated by vacuum plasma spray
3. Microstructure and oxidation behavior of in situ formed TaSi2–Si3N4 nanocomposite coating grown on Ta substrate
4. Oxidation behavior of Ta Si N coatings
5. Development of a complex heat resistant hard coating based on (Ta,Si)N by reactive sputtering
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