Experimental and theoretical study of a magnetron DC-PECVD acetylene discharge: Identification of the deposition precursors and film growth mechanisms-Reference-Cited by-同舟云学术

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Experimental and theoretical study of a magnetron DC-PECVD acetylene discharge: Identification of the deposition precursors and film growth mechanisms

Published:2021-09 Issue: Volume:421 Page:127472
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Fauroux A.^ORCID,Pflug A.,Lucas S.^ORCID

Funder

Fédération Wallonie-Bruxelles

European Regional Development Fund

Walloon Public Service

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference51 articles.

1. Diamond-like carbon films, properties and applications;Robertson;Compr. Hard Mater.,2014

2. Atomistic simulations of diamond-like carbon growth;Joe,2012

3. Effect of film thickness on the stress and adhesion of diamond-like carbon coatings;Sheeja;Diam. Relat. Mater.,2002

4. Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel;Hirata;J. Appl. Phys.,2016

5. Interface modifications for improving the adhesion of a-C:H films to metals;Grill;J. Mater. Res.,1988

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1. Tailoring Mechanical Properties of a-C:H:Cr Coatings;Coatings;2023-12-14

2. Foundations of plasma enhanced chemical vapor deposition of functional coatings;Plasma Sources Science and Technology;2023-07-01

3. Challenges and coating solutions for wear and corrosion inside Lead Bismuth Eutectic: A review;Surface and Coatings Technology;2022-07

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