Characterization of sp2/sp3 hybridization ratios of hydrogenated amorphous carbon films deposited in C2H2 inductively coupled plasmas
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference45 articles.
1. Study on the etching characteristics of amorphous carbon layer in oxygen plasma with carbonyl sulfide;Kim;J. Vac. Sci. Technol. A,2013
2. Surface analysis of amorphous carbon thin film for etch hard mask;Kim;J. Nanosci. Nanotechnol.,2021
3. Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask;Park;Thin Solid Films,2018
4. Hard mask and lithographic capabilities improvement by amorphous carbon step coverage optimization in high aspect ratio device pattern;Lai;Vacuum,2018
5. Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation;Karahashi;Jpn. J. Appl. Phys.,2017
Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Investigation of the removal mechanism in amorphous carbon chemical mechanical polishing for achieving an atomic-scale roughness;Applied Surface Science;2024-10
2. Sub-minute carbonization of polymer/carbon nanotube films by microwave induction heating for ultrafast preparation of hard carbon anodes for sodium-ion batteries;Chemical Engineering Journal;2024-09
3. Long-Term Coprocessing of Used Cooking Oils with Refinery Petroleum Fractions: A Comprehensive Study of Catalyst Activity and Biofuel Production Effects;Energy & Fuels;2024-07-31
4. Weak oxidant fraction in the microwave plasma influencing the evolution of nanocrystalline-diamond–imbedded diamond–like carbon network at low temperatures and its orbital hybridization dependent wide optical band gaps;Diamond and Related Materials;2024-05
5. Glass‐Like Phonon Dynamics and Thermal Transport in a GeTe Nano‐Composite at Low Temperature;Small;2024-04-18
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3