Chemical bonding and composition of silicon nitride films prepared by inductively coupled plasma chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference31 articles.
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3. Surface Structure of Commercial Si3N4 Powders Analyzed by X-Ray Photoelectron Spectroscopy (XPS)
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