When magnetron sputtering deposition meets machine learning: Application to process anomaly detection-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

When magnetron sputtering deposition meets machine learning: Application to process anomaly detection

Published:2024-02 Issue: Volume:477 Page:130301
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Delchevalerie Valentin,de Moor Nicolas,Rassinfosse Louis,Haye Emile,Frenay Benoît,Lucas Stéphane

Funder

Fonds pour la Formation à la Recherche dans l’Industrie et dans l’Agriculture

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference37 articles.

1. Industrial applications of CrN (PVD) coatings, deposited at high and low temperatures;Navinšek;Surf. Coat. Technol.,1997

2. Improving the properties of titanium nitride by incorporation of silicon;Diserens;Surf. Coat. Technol.,1998

3. Achieving on chip micro-supercapacitors based on CrN deposited by bipolar magnetron sputtering at glancing angle;Haye;Electrochim. Acta,2019

4. Electrochemical stability enhancement in reactive magnetron sputtered VN films upon annealing treatment;Achour;Coatings,2019

5. Reactive sputtering of vanadium nitride thin films as pseudo-capacitor electrodes for high areal capacitance and cyclic stability;Achour;J. Mater. Sci. Mater. Electron.,2018

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Introduction to the Special Collection for the Society of Vacuum Coaters' 66th Annual Technical Conference;Surface and Coatings Technology;2024-09

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3